[단위공정/Deposition] CVD시 분자 운동식, Graph

물리량, 단위

Hg [Cm/s]: mass transfer coefficient
Ks [Cm/s]: Surface reaction rate
Cg [#/Cm3]: Bulk gas concentration
Cs [#/Cm3]: Surface gas concentration
F [#/Cm2•s]: Flux
δ [Cm]: Boundary layer

---