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Semiconductor/Deposition

[단위공정/Deposition] CVD시 분자 운동식, Graph

by 겨울 빛 2022. 2. 1.
물리량, 단위


Hg [Cm/s]: mass transfer coefficient
Ks [Cm/s]: Surface reaction rate
Cg [#/Cm3]: Bulk gas concentration
Cs [#/Cm3]: Surface gas concentration
F [#/Cm2•s]: Flux
δ [Cm]: Boundary layer


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